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KMID : 0381920150450040199
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Korean Journal of Microscopy
2015 Volume.45 No. 4 p.199 ~ p.202
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Transmission Electron Microscopy Sample Preparation of Ge2Sb2Te5 Nanowire Using Electron Beam
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Lee Hee-Sun
Lee Jun-Young
Yeo Jong-Souk
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Abstract
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A simple and novel transmission electron microscopy (TEM) sample preparation method for phase change nanowire is investigated. A Ge2Sb2Te5 (GST) nanowire TEM sample was meticulously prepared using nanomanipulator and gas injection system in a fi eld emission scanning electron microscopy for efficient and accurate TEM analysis. The process can minimize the damage during the TEM sample preparation of the nanowires, thus enabling the crystallographic analysis of as-grown GST nanowires without unexpected phase transition caused by e-beam heating.
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KEYWORD
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Gas injection system, Nanowire, Transmission electron microscopy sample, Nanomanipulator, Electron beam
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